The reliability tests used for wafer process qualification are summarized in the following table.
Reliability Test | Conditions | Duration | Lot Quantity | Sample Size per Lot | Acceptance Criteria |
---|---|---|---|---|---|
High-temperature operating life (HTOL) | TJ ≥ 125°C, VDD Max | 1,000 hours | 3 | 77 |
200 FIT 1 50 FIT 2 |
THB 3 or Highly accelerated temperature and humidity stress test (HAST) 3 | 85°C, 85% RH, VDD | 1,000 hours | 3 | 25 | 0 failures |
130°C, 85% RH, VDD | 96 hours | ||||
110°C, 85% RH, V DD | 264 hours | ||||
Temperature humidity (TH) 3 or Unbiased highly accelerated temperature and humidity stress test (UHAST) 3 | 85°C, 85% RH | 1,000 hours | 3 | 25 | 0 failures |
130°C, 85% RH | 96 hours | ||||
110°C, 85% RH | 264 hours | ||||
Temperature cycling (TC) 3, 4, 5, 6, | –65°C to +150°C | 500 cycles | 3 | 25 | 0 failures |
–55°C to+125°C | 1,000 cycles | ||||
–40°C to +125°C | 1,000 cycles | ||||
Data Retention Bake 7 or High Temperature Storage (HTS) | TA = 150°C | 1,000 hours | 3 | 25 | 0 failures |
Program Erase 8 | TA = 25°C | 10,000 cycles | 1 | 32 | 0 failures |
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